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专利名称：METHOD FOR DETECTING THE POSITION
AND DIRECTION OF A FINE OBJECT
发明人：MORITADA KUBO,YOSHIAKI ARIMURA申请号：US3693154D申请日：19701211公开号：US3693154A公开日：19720919
摘要：A method for detecting the position of a semiconductor pellet which comprisesthe steps of affixing to the surface of the semiconductor pellet a position detectingpattern generating upon scanning pulses of prescribed width, interval and number,picking up the image of said pellet, scanning the pattern image with six scanning lines L1to L6 to obtain signals L1' to L6' using a first group of delay circuits, treating said signalsin a logical circuit including a second group of delay circuits to obtain logical outputexpression as (L1'+L2').(L3'+L4').(L5'+L6')+(L1'.L2'.L3')=1 and calculating the position ofthe semiconductor pellet using said logical outputs.
申请人：TOKYO SHIBAURA ELECTRIC CO. LTD.
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