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专利名称：MEMS MICROPHONE ASSEMBLY AND
METHOD OF MANUFACTURING THE MEMSMICROPHONE ASSEMBLY
发明人：Jan Tue Ravnkilde申请号：US14388144申请日：20120502
公开号：US20150054098A1公开日：20150226
专利附图：
摘要：The present invention concerns a MEMS microphone assembly () comprising aMEMS transducer element () comprising a MEMS die (), a back plate () and a diaphragm ()
displaceable in relation to the back plate (), and a sound inlet () for acoustically couplingthe MEMS transducer element () to the exterior of the MEMS microphone assembly (),wherein the MEMS die () comprises an indentation () that forms at least a part of thesound inlet (). Further, the present invention concerns a method of manufacturing saidMEMS microphone assembly ().
申请人：Jan Tue Ravnkilde
地址：Hedehusene DK
国籍：DK
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