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专利名称：MOLECULAR BEAM EPITAXY EQUIPMENT发明人：BOUCHAIB, PIERRE,STEMMELEN, FRANCK申请号：FR0201806申请日：20020529公开号：WO02097172A3公开日：20030327
摘要：Epithaxy equipment comprising an epitaxy vacuum chamber containing asubstrate support and at least one cell for vacuum evaporation of epitaxy materialclosed by a diaphragm having at least one opening and communicating with the epitaxychamber by a connecting brace element. The inventive equipment also comprises amoveable plate whose cross-section corresponds to the cross-section of the diaphragmand which is placed opposite said perforated diaphragm.
申请人：ADDON,BOUCHAIB, PIERRE,STEMMELEN, FRANCK
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